| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional measuring instrument capable of measuring an object to be measured with high accuracy, and an illuminator to be used in the three-dimensional measuring instrument. <P>SOLUTION: A three-dimensional measuring instrument 1 includes illumination means 2 for irradiating an object 8 to be measured with circular polarization, and movement means 3 for moving the illumination means 2. The three-dimensional measuring instrument 1 further includes imaging means 4 for receiving reflected light from a surface to be irradiated of the object 8 to be measured to image the surface to be irradiated, and calculation means 5 for detecting a polarized state of the reflected light by using an imaged image picked up by the imaging means 4 and calculating the direction of the surface to be irradiated of the object 8 to be measured. The illumination means 2 irradiates a portion of the object 8 to be measured with the circular polarization. The movement means 3 moves the illumination means 2 so as to change the position of the surface to be irradiated in the object 8 to be measured. <P>COPYRIGHT: (C)2013,JPO&INPIT |
