| 摘要 |
The present invention relates to a substrate spinning device. The substrate spinning device includes: multiple rotating support units installed to be erected in the shape of a pillar and rotating while coming into contact with an edge of a substrate, wherein the rotating support unit includes a first rotating support unit and a second rotating support unit horizontally rotating the substrate by transmitting a rotation force to the substrate; a fixing block installed in the first rotating support unit; and a sensing support unit sensing a rotation number of the substrate by being installed to rotate by fiction as the sensing support unit is engaged with the rotation of the substrate while coming into contact with the edge of the substrate, wherein the sensing support unit is installed in the fixing block. When the first rotating support unit moves the substrate to a position of rotating while supporting the substrate by being in contact with the substrate, the sensing support unit fixed to the fixing block is in contact with the substrate. So the substrate spinning device can reliably hold the substrate without missing the substrate and has a structure which is compact and conveniently controlled. |
