MEMS tilt sensor

摘要

An acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.

主权项

1. An acoustic apparatus, the apparatus comprising:
a back plate that is selectively charged, the back plate having a plurality of openings extending therethrough; at least one back plate electrode coupled to the back plate; a proof of mass, the proof of mass elastically coupled to and hanging from the back plate in a vertical position; a proof of mass electrode coupled to the proof of mass; wherein movement of the apparatus causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary, the capacitance representing a magnitude of the movement of the apparatus; wherein movement of the apparatus causes a tilt of the back plate while the proof of mass substantially maintains the vertical position.