| 摘要 |
PROBLEM TO BE SOLVED: To detect a defect on the satin-like surface of an object with high accuracy.SOLUTION: In the inspection device, a plurality of light source units 42, 43 are provided, each irradiating an object area on the surface of an object 9 with light from a plurality of directions, a first captured image indicating the object area is acquired by one image-capturing unit 32, 33 by radiation of light from one light source unit among the plurality of light source units, and a second captured image is acquired by the image-capturing units by radiation of light from the plurality of light source units. A first defect candidate area is detected by comparing the first captured image with a first reference image that corresponds to the first captured image, and a second defect candidate area is detected by comparing the second captured image with a second reference image that corresponds to the second captured image. An area overlapping in the first defect candidate area and the second defect candidate area is specified as a defect area in the object area. A defect on the satin-like surface of the object can thereby be detected with high accuracy.SELECTED DRAWING: Figure 2 |
