| 主权项 |
1. An image sensor comprising:
a first sub-gate in a recessed region in a substrate; a second sub-gate on the first sub-gate in contact with an upper surface of the substrate; an element isolation region in the substrate spaced apart from the first sub-gate; and a floating diffusion region positioned between the first sub-gate and the element isolation region in a second direction that lies in a plane that is parallel to the plane of the substrate on a first side of the second sub-gate, wherein a lower surface of the second sub-gate is wider than an upper surface of the first sub-gate, and wherein a portion of the element isolation region is spaced apart from the second sub-gate on a second side of the second sub-gate by a first distance in a first direction that lies in a plane that is parallel to the plane of the substrate and is perpendicular to the second direction in a plan view, wherein the second side of the second sub-gate is different than the first side of the second sub-gate and the second side of the second sub-gate is perpendicular to the first side of the second sub-gate, and wherein the floating diffusion region is spaced apart from the first sub-gate on the first side of the second sub-gate in the second direction different than the first direction and, in the plan view, a width of the portion of the element isolation region extending in the second direction is between a width of the second sub-gate in the second direction and a width of the first sub-gate in the second direction. |
