发明名称 ELECTROSTATIC FORCE TESTER
摘要 An electrostatic force testing apparatus applies an electrostatic force to a test specimen and thereby imparts stress on the specimen. A focused electrostatic force is applied to the test specimen using a shaped probe tip of the electrostatic force testing apparatus. The force applied to the test specimen may be varied based on a distance of the probe tip from the test specimen, a voltage applied to the probe tip, and a shape of the probe tip.
申请公布号 EP3004859(A1) 申请公布日期 2016.04.13
申请号 EP20140807313 申请日期 2014.06.03
申请人 NANOMECHANICS, INC. 发明人 OLIVER, WARREN;PARKS, KERMIT, HUNTER;PARDHASARADHI, SUDHARSHAN, PHANI
分类号 G01N27/60;G01Q80/00 主分类号 G01N27/60
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