Methods and apparatus providing thermal isolation of photonic devices

摘要

Described embodiments include photonic integrated circuits and systems with photonic devices, including thermal isolation regions for the photonic devices. Methods of fabricating such circuits and systems are also described.

主权项

1. An integrated structure comprising:
a substrate having an upper surface; a first trench formed in the upper surface of the substrate; a device formation region over the upper surface of the substrate; a first temperature-sensitive photonic device formed in the device formation region; a waveguide formed in the device formation region and separated from the trench by a portion of the substrate; a heating device formed in the device formation region for heating the first temperature-sensitive photonic device, wherein the heating device is located over the first trench; and a first thermal isolation region formed under the heating device, wherein the first thermal isolation region is located in the first trench, such that the first thermal isolation region is provided in the upper surface of the substrate, and wherein the first thermal isolation region reduces dissipation of heat from the heating device into the substrate.