发明名称 |
MULTIFUNCTION WAFER AND FILM FRAME HANDLING SYSTEM |
摘要 |
A wafer table structure providing a single wafer table surface suitable for handling both wafers and film frames includes a base tray having a set of compartments formed therein by way of a set of ridges formed in or on an interior base tray surface; a hardenable fluid permeable compartment material disposed within the set of base tray compartments; and a set of openings formed in the base tray interior surface by which the hardened compartment material is exposable to negative or positive pressures. The base tray includes a first ceramic material (e.g., porcelain), and the hardenable compartment material includes a second ceramic material. The base tray and the compartment material are simultaneously machinable by way of a standard machining process to thereby planarize exposed outer surfaces of the base tray and the hardened compartment material at an essentially identical rate for forming a highly or ultra-planar wafer table surface. |
申请公布号 |
EP2891173(A4) |
申请公布日期 |
2016.03.30 |
申请号 |
EP20130832999 |
申请日期 |
2013.09.02 |
申请人 |
SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS PTE LTD. |
发明人 |
JIN, JIAN PING;LEE, LENG KHEAM |
分类号 |
H01L21/683;H01L21/687 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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