发明名称 FINE LINE METALIZATION OF PHOTOVOLTAIC DEVICES BY PARTIAL LIFT-OFF OF OPTICAL COATINGS
摘要 PROBLEM TO BE SOLVED: To provide a method of forming a metal grid contact and a dielectric pattern in a photovoltaic device.SOLUTION: A method includes the steps of: providing a patterned resist 43, which covers a first portion of a device layer, over the device layer; providing a dielectric layer 42 over the patterned resist 43 and a second portion of the device layer; forming one or more openings in the dielectric layer 42' on the patterned resist 43 and exposing portions of the patterned resist 43; removing the patterned resist 43 through the exposed portions of the patterned resist 43 and removing the dielectric layer 42' on the patterned resist 43 by removing the patterned resist 43 without removing the dielectric layer 42 on the second portion of the device layer.SELECTED DRAWING: Figure 4H
申请公布号 JP2016040846(A) 申请公布日期 2016.03.24
申请号 JP20150225455 申请日期 2015.11.18
申请人 TETRASUN INC 发明人 OLIVER SCHULTZ-WITTMANN;CRAFTS DOUGLAS;DENIS DECEUSTER;ADRIAN TURNER
分类号 H01L31/0224 主分类号 H01L31/0224
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