| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical apparatus and an exposure apparatus which can contribute to increase in manufacture efficiency of a device with increase in an output of a light source, even when a spatial light modulation member is disposed in an optical path of light emitted from the light source, and a method for manufacturing a device.SOLUTION: An exposure apparatus 11 includes an illumination optical apparatus 13 that guides exposure light EL emitted from an exposure light source 12 to a reticle R. The illumination optical apparatus 13 includes a plurality of movable multimirrors 22 arranged in an array, in which each movable multimirror 22 is composed of a plurality of element mirrors having a movable reflection surface, arranged in an array. Each movable multimirror 22 is disposed in an optical path of the exposure light EL emitted from the light source 12.SELECTED DRAWING: Figure 1 |
