| 摘要 |
<P>PROBLEM TO BE SOLVED: To reliably inhibit breakage of a glass plate and generation of thermal residual strain by reducing as much as possible the loss of thermal energy incurred at preheating and at annealing before and after fuse-cutting. <P>SOLUTION: The glass substrate G is fused/cut and separated into a product part Ga and a non-product part Gb with scheduled cutting line CL as boundary, by emitting a laser beam LB1 for fuse-cutting and a laser beam LB2 for annealing along the scheduled cutting line CL of the glass substrate G. At this time, the dimension of irradiation area SP2 of the annealing laser beam LB2 is made larger than the dimension of irradiation area SP1 of the fuse-cutting laser beam LB1 in the progression direction of fuse-cutting along the scheduled cutting line CL. And the irradiation area SP2 of the annealing laser beam LB2 is overlapped on the irradiation area SP1 of the fuse-cutting laser beam LB1 so that the irradiation area SP2 of the annealing laser beam LB2 straddles in front and back directions in which fuse-cutting of the irradiation area SP1 of the fuse-cutting laser beam LB1 progresses. <P>COPYRIGHT: (C)2013,JPO&INPIT |
