发明名称 SEMICONDUCTOR FABRICATION PROCESS
摘要 A semiconductor manufacturing method is described. An embodiment of the semiconductor manufacturing method comprises a step of providing a layer formed by decomposition of dimethylsilane through chemical vapor deposition wherein the layer is applied by a fluid material, and then arranging the layer in a system for producing a semiconductor product. Additionally or alternatively, the semiconductor product is produced or the layer is on a substrate.
申请公布号 KR20160028358(A) 申请公布日期 2016.03.11
申请号 KR20150116889 申请日期 2015.08.19
申请人 SILCOTEK CORP. 发明人 MATTZELA JAMES B.
分类号 H01L21/56;H01L21/02;H01L21/205;H01L21/316 主分类号 H01L21/56
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