SURFACE ENHANCED RAMAN SPECTROSCOPY DETECTION OF GASES, PARTICLES AND LIQUIDS THROUGH NANOPILLAR STRUCTURES

摘要

Methods and systems for nanopillar sensors are described. Nanopillars can be defined on a substrate, and metal deposited on the nanopillars. A thermal treatment can reflow the metal on the nanopillars forming metallic bulbs on the top end of the nanopillars. These structures can have enhanced optical detection when functionalized with biological agents, or can detect gases, particles and liquids through interaction with the metal layer on the nanopillars.

主权项

1. A method to detect gases, liquids or particles, the method comprising:
providing a sensor, the sensor comprising
a substrate,at least one recessed region on the substrate,nanopillars defined in the at least one recessed region,metallic bulbs on a top end of the nanopillars; inserting the sensor in an environment; and illuminating, by a laser, the metallic bulbs on the top end of the nanopillars, thereby detecting presence or absence of a target gas, liquid or particle.