Bulk acoustic wave accelerometers

摘要

Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.

主权项

1. A method of measuring motion using an electromechanical resonator having a resonant frequency and an electrical spring constant, the electromechanical resonator comprising a resonator element, the method comprising:
driving the resonator element to vibrate along a first axis in a bulk acoustic resonance mode at a resonant frequency, the resonator element suspended by a suspension member configured to vibrate in a flexural mode; and measuring motion along the first axis based on a change in the electrical spring constant of the electromechanical resonator.