发明名称 |
THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
Provided is a thin film transistor array substrate having at least one thin film transistor. The thin film transistor includes a semiconductor layer having a channel area with a first doping concentration on a substrate, a source-drain area disposed at opposite sides of the channel area and with a second doping concentration greater than the first doping concentration, and a substantially undoped area extending from the source-drain area. The substrate has a gate insulating layer on the semiconductor layer and a gate electrode disposed on the gate insulating layer and overlapping the channel area in at least some portions. The substrate has a source electrode and a drain electrode, each insulated from the gate electrode and electrically connected to the source-drain area. The gate electrode includes a first gate electrode layer and a second gate electrode layer, wherein the second gate electrode layer is thicker than the first gate electrode layer. |
申请公布号 |
US2016064425(A1) |
申请公布日期 |
2016.03.03 |
申请号 |
US201514721505 |
申请日期 |
2015.05.26 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
KIM Myounghwa;Kang Jaewook;Jeon Joohee;Lee Jongchan;Khang Yoonho |
分类号 |
H01L27/12;H01L29/49;G02F1/1362;H01L29/786;H01L27/32;G02F1/1368;H01L29/423;H01L29/45 |
主分类号 |
H01L27/12 |
代理机构 |
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代理人 |
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主权项 |
1. A thin film transistor array substrate, comprising:
a thin film transistor, wherein the thin film transistor comprises: a semiconductor layer comprising a channel area having a first doping concentration on a substrate, a source-drain area disposed at opposite sides of the channel area and has a second doping concentration greater than the first doping concentration, and a substantially undoped area extending from the source-drain area; a gate insulating layer on the semiconductor layer; a gate electrode disposed on the gate insulating layer and overlapping the channel area in at least some portions; and a source electrode and a drain electrode, each insulated from the gate electrode and electrically connected to the source-drain area,
wherein the gate electrode comprises:a first gate electrode layer; anda second gate electrode layer,
wherein the second gate electrode layer is thicker than the first gate electrode layer. |
地址 |
Yongin-city KR |