Fastener system for supporting a liner plate in a gas showerhead reactor

摘要

A fastener system and method for supporting and retaining modular insulating quartz liners with gas apertures in close proximity to corresponding apertures in diffusers of gas showerheads. Tubular fasteners have a head, a tubular shank and a foot that extend through a liner plate nozzle into a diffuser plate. A keyway in the gas diffuser, aligned and coaxial with a diffuser nozzle, allows the foot to reach an arcuate concourse through a keyway where it can be locked by bayonet turning. The keyway is machined into the diffuser by EDM and is an inversion of the fastener tip geometry rotated about the axis of the tubular shank. Each fastener and nozzle set form a coaxial path for distributing processing gas to substrates through liner and diffuser plates from a plenum in showerheads of a MOCVD reactor.

主权项

1. A fastener for joining two members of a gas showerhead reactor comprising:
first and second planar members of a gas nozzle array associated with a showerhead of a gas reactor, wherein nozzles in each planar member are aligned for gas passage from one side of the joined members to the opposite side; and a hollow fastener fitting into the first and second members, each fastener having a tubular shank extending completely through said one of the first and second members and having a head for stopping passage of the shank beyond a distance in said one of the first and second members with a foot extending from the shank opposite the head at a distance extending partially into the other of the first and second members through a keyway, the tubular shank and foot surrounding a hollow central region forming a nozzle extending completely through said one of the first and second members and partially through the other of the first and second member to a nozzle of the other of the first and second members, the other member having an arcuate concourse communicating with the keyway, whereby the foot may be turned in the concourse, locking the second member to the first member in a bayonet tip manner.