| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating of deposit which can be applied cost effectively by a PVD process and which is operable at high temperatures under boundary lubrication conditions such as lubrication of a piston ring.SOLUTION: The coating is made by pretreating a workpiece surface by simultaneous bombardment with accelerated ions of W, Mo and C, which are generated by a HIPIMS discharge in a treatment chamber 14. This is followed by deposition of a transition layer of metal and/or metal nitride in a thickness range of 20 nm-1000 nm by magnetron sputtering optionally including HIPIMS sputtering, the metal being at least one of W and Mo, and then followed by a C coating, on the transition layer, with 5-20 atom% of a metal doped by HIPIMS sputtering, or a coating of a deposit comprising a metal-doped C coating in which the metal is present in a ratio of atom% of metal Mc to atom% of carbon C not exceeding 1:4.SELECTED DRAWING: Figure 1 |
