发明名称 TESTING APPARATUS AND TESTING METHOD
摘要 The objective of the present invention is to effectively improve a manufacturing line by detecting errors at an early stage. A testing apparatus according to an embodiment comprises a testing part and an imaging part, and a control part. The testing part has light emitting elements arranged in series and irradiates an ultraviolet ray to a substrate which has a light emitting layer in at least one organic EL layer on a main surface from the light emitting element. The imaging part photographs the substrate to which the ultraviolet ray is irradiated, in a predetermined imaging region. The control part detects the error of the substrate based on an image photographed by the imaging part.
申请公布号 KR20160018363(A) 申请公布日期 2016.02.17
申请号 KR20150105839 申请日期 2015.07.27
申请人 TOKYO ELECTRON LIMITED 发明人 SHINOGI TAKETORA;HAYASHI TERUYUKI;TANAKA SHIGEKI;ONOUE KOUTAROU
分类号 H01L51/56;H01L21/66 主分类号 H01L51/56
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