| 摘要 |
A rotary vacuum pump using vacuum oil is provided. A cooling water jacket is formed in parts of a pump module to make a cooling water circulation structure herein, thereby preventing an increase in the temperature of the pump module by directly cooling heat generated from the pump module. And, oil is cooled in a vacuum oil contact surface coming in contact with the cooling water jacket of the pump module, and the oil transferred by an oil pump flows to an oil path exposed to the cooling water jacket to cool the oil by the cooling water stored in the cooling water jacket, thereby preventing an increase in the temperature of the pump module. Therefore, the present invention provides stable pump environment through a structure of cooling oil threefold. Moreover, the present invention reduces the number of parts by making a pump body and a single-stage cylinder in a single part, thereby reducing production costs. |
