发明名称 多数のカメラを用いる結晶の成長特性計測方法
摘要 Three-dimensional measurement of a crystal being pulled from a crucible is described. A first camera captures a first image of the crystal on a first image plane and a second camera captures a second image of the crystal on a second image plane. A mathematical model of a crystal during crystal growth is generated. The model includes a plurality of model sample points. A crystal growth feature is detected within the first image and the second image. A first error value is determined by comparing the model to the at least one crystal growth feature within the first image and a second error value is determined by comparing the model to the at least one crystal growth feature within the second image. An estimated 3-D metrology value associated with the at least one crystal growth feature is generated by adjusting the mathematical model to minimize the determined first error value and the determined second error value.
申请公布号 JP5859566(B2) 申请公布日期 2016.02.10
申请号 JP20130546814 申请日期 2011.12.28
申请人 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッドMEMC ELECTRONIC MATERIALS,INCORPORATED 发明人 スティーブン・エル・キンベル;ロバート・エイチ・フューアホフ
分类号 C30B15/22;C30B29/06 主分类号 C30B15/22
代理机构 代理人
主权项
地址