ELECTROSTATIC MICROPHONE WITH REDUCED ACOUSTIC NOISE

摘要

A micro electro mechanical system (MEMS) microphone includes a base; a MEMS die disposed on the base; and a cover coupled to the base and enclosing the MEMS die. The MEMS die includes and diaphragm and back plate and posts extend from a first periphery of the back plate. The diaphragm is free to move within a boundary created by the posts. A front volume is formed on a first side of the diaphragm and a back volume is formed on a second side of the diaphragm between the diaphragm and the cover. A plurality of openings extend through the diaphragm about an outer periphery of the diaphragm, the openings being effective to mitigate noise.

主权项

1. A micro electro mechanical system (MEMS) microphone, the microphone comprising:
a base; a MEMS die disposed on the base; a cover coupled to the base and enclosing the MEMS die; wherein the MEMS die includes and diaphragm and back plate; wherein posts extend from a periphery of the back plate; wherein the diaphragm is free to move within a boundary created by the posts; wherein a front volume is formed on a first side of the diaphragm and a back volume is formed on a second side of the diaphragm between the diaphragm and the cover; wherein a plurality of openings extend through the diaphragm about an outer periphery of the diaphragm, the openings being effective to mitigate noise.