发明名称 |
OBJECT HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING AN OBJECT HOLDER |
摘要 |
A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body. |
申请公布号 |
EP2979135(A2) |
申请公布日期 |
2016.02.03 |
申请号 |
EP20140708521 |
申请日期 |
2014.02.26 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LAFARRE, RAYMOND;ACHANTA, SATISH;FILIPPI, MATTEO;KARADE, YOGESH;NELLISSEN, ANTONIUS;VAN DER WILK, RONALD;VAN DOREMALEN, HENDRIKUS, CHRISTOFFEL, MARIA;WELTERS, WILHELMUS |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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