UV LIGHT EMITTING DIODE AND METHOD OF FABRICATING THE SAME

摘要

Disclosed are an ultraviolet (UV) light emitting diode and a method of fabricating the same. The method of fabricating a UV light emitting diode comprises growing a first n-type semiconductor layer including AlGaN, wherein growth of the first n-type semiconductor layer includes changing a growth pressure within a growth chamber and changing a flow rate of an n-type dopant source introduced into the growth chamber. A pressure change during growth of the first n-type semiconductor layer includes at least one cycle of a pressure increasing period and a pressure decreasing period over time, and change in flow rate of the n-type dopant source includes increasing the flow rate of the n-type dopant source in the form of at least one pulse. The UV light emitting diode fabricated by the method has excellent crystallinity.