| 摘要 |
PROBLEM TO BE SOLVED: To provide a length measuring machine, displacement amount calculation means, and an alignment method of a scale portion and a pattern reader of a length measuring machine, capable of individually adjusting an inclination between the pattern reader and the scale portion and a deviation therebetween in a scale alignment direction.SOLUTION: A length measuring machine is configured so that a pattern reader 14-2 includes parallel-position-adjustment reader portions 51, 52 detecting a deviation between the pattern reader 14-2 and a scale portion in a scale alignment direction; and inclination-adjustment reader portions 61, 62 detecting an inclination between the pattern reader 14-2 and the scale portion, the parallel-position-adjustment reader portions 51, 52 read a predetermined scale in response to movement of the scale portion and the pattern reader 14-2 along a pattern direction, the inclination-adjustment reader portions 61, 62 are disposed to read two different scales, the deviation is detected on the basis of shapes of output waveforms from the parallel-position-adjustment reader portions 51, 52, and the inclination is detected on the basis of phases of output waveforms from the inclination-adjustment reader potions 61, 62. |
