MAGNETRON SPUTTERING GUN ASSEMBLY

摘要

A magnetron sputtering gun device used in vacuum for sputtering to form a thin film, which comprises a magnet copper seat, a magnetic element, a conductive element, a sputtering target, a target fixation assembly, a cylinder-shape protection mask, and a sputtering inclination assembly. By enhancing the magnet copper seat, the magnetron sputtering gun device is equipped with capability of increased film coating speed and increased compound ability between the thin film and the reaction gas. A ferromagnetic material may be coated. The magnet copper seat may be designed so that the sputtering target and strong magnets therewithin may be conveniently detached. In this structure, a cooling water tubing and the strong magnets are separated, lengthening a lifetime of the strong magnets and protecting the strong magnets from demagnetization. The sputtering inclination assembly may further increase a uniformity of the thin film thickness.

主权项

1. An imbedded mobile detection device, comprising:
a radiation detector, comprising a detection crystal and a photo-sensitive element, for effectively absorbing a species and an energy range of radioactive particles of a predetermined detection object, and generating an analog pulse signal based thereon, wherein the detection crystal is a C:Al2O3 crystal having oxygen vacancy deficiencies formed by subjecting a carbon covered Al2O3 structure to vacuum diffusion and atmosphere annealing, when any radioactive particle exists in an on-spot environment, an energy thereof is absorbed through a recombination process of the vacancy deficiencies, and the photo-sensitive element converts photo-pulses generated by the detection crystal having absorbed the energy of the radioactive particles into an analog pulse signal; an analog-digital converter (ADC), coupled to the radiation detector and converting the analog pulse signal into a digital logic pulse signal; and a software application unit, coupled to the ADC and receiving and computing the digital logic pulse signal by using a software setting function thereof, executing a radiation energy spectrum calculation and a nuclide comparison program, acquiring a radiation energy spectrum analysis information, so that a measurement result is online processed and a species of the nuclide is accurately determined.