| 摘要 |
The present invention relates to a wafer cassette. Especially, the present invention is to provide a semiconductor wafer cassette capable of opening and closing a door by selecting the door of a hinged type or a sliding type. For this, according to the present invention, disclosed is the wafer cassette including: a cassette main body which has a number of slots supporting an edge part of both sides of the wafer on opposite inner walls of side plates arranged at a fixed interval on a side with an open front; and the door for opening and closing an aperture of the cassette main body. Guide grooves are formed on an upper part of the opposite inner walls of the side plates along a horizontal direction respectively. A roller is installed at both ends of an upper part of the door so that the door is opened or closed as being slid along the guide groove. A first stopper groove confining the roller is formed on the guide groove at an upper side of the aperture of the cassette main body in order for the door to maintain the aperture of the cassette main body to be closed. A first and a second holding pin are comprised on a lower part of the opposite inner walls of the side plates at a fixed interval. A second stopper groove confining the roller is formed on the guide groove at a fixed interval from the first stopper groove in order for the door to maintain the aperture of the cassette main body to be opened. |
