Gas Enclosure Systems and Methods Utilizing Multi-Zone Circulation and Filtration

摘要

The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.

主权项

1. An industrial printing tool comprising:
a printing system comprising:
a substrate support apparatus for supporting a substrate,a carriage assembly mounted to a bridge, where the carriage assembly is configured to position a printhead assembly relative to the substrate; a gas enclosure defining an interior containing a gas, wherein the gas enclosure comprises a first tunnel enclosure section, a bridge enclosure section and a second tunnel enclosure section; and a gas circulation and filtration system for circulating the gas within the gas enclosure, the gas circulation and filtration system comprising:
a tunnel circulation and filtration system configured to filter and circulate the gas around the substrate support apparatus in a circulation path across the direction of substrate travel; anda bridge circulation and filtration system configured to filter and circulate gas around the carriage assembly.