| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer light irradiation device in which the clearance between an excimer lamp and a processing target can be extremely easily adjusted with high precision.SOLUTION: An excimer light irradiation device has an excimer lamp which has an arc tube extending in one direction and is provided in a downward-opened housing so that both the ends of the excimer lamp are suspended by a lamp holding mechanism. The lamp holding mechanism has a pair of movable bodies which are provided to be spaced from each other in the one direction and movable in the up-and-down direction, and a pair of lamp holders for respectively holding both the ends of the excimer lamp which are moved in the up-and-down direction in connection with movement of the movable bodies. Each of the movable bodies has a shaft portion extending in a direction perpendicular to the one direction within a horizontal plane, and each lamp holder is configured to be swingable around the shaft portion of the corresponding movable body. |
