ION INJECTION DEVICE AND ION INJECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ion injection device and an ion injection method that can be used in a wide range.SOLUTION: An ion injection device 300 comprises a beam scanning part 306 and a beam parallelizing part 308 disposed downstream of the beam scanning part 306. The beam scanning part 306 has a scanning origin point on the central axis of an incident ion beam and in the central part of the beam scanning part 306. The beam parallelizing part 308 has a focal point at the scanning origin point as a parallelizing lens. The ion injection device 300 is configured such that the focal point of an ion beam made incident on the beam scanning part 306 is located further upstream than the scanning origin point along the central axis of the incident ion beam. The focal point of an ion beam made incident on the beam scanning part 306 is adjusted along the central axis of the incident ion beam and further upstream than the scanning origin point, so as to correct a divergence phenomenon resulting from a space charge effect by an ion beam emitted from the beam parallelizing part 308.