MEASUREMENT AND INSPECTION DEVICE

摘要

The present invention relates to a measurement and inspection device of a scanning-type electron beam system, and provides a technique for achieving a measuring/inspecting process with high precision in accordance with a scanning speed. A secondary electron signal detection system in the present measurement and inspection device is suitably applicable to a scanning control with a plurality of scanning speeds, and the device is provided with a detector 107 for detecting a secondary electron signal (SE) derived from an irradiation onto a sample 110 with an electron beam by a scanning control process, a preamplifier 30 for current-to-voltage converting and pre-amplifying the output, an analog signal processing and amplifying unit 51 to which the output of the preamplifier 30 is inputted to carry out an analog processing and amplifying process thereon as a secondary electron signal detection unit 50, an ADC 52 for analog-to-digital converting the output thereof, and an image processing unit 205 for generating an image for use in measurements or inspections based upon the output. A control unit 210 carries out a switching control of respective units including an LPF (12) inside the analog signal processing and amplifying unit 51, in accordance with a scanning speed or the like.

主权项

1. A measurement and inspection device which carries out at least either a measuring process or an inspecting process on a sample by using a scanning type electron beam system, comprising:
an irradiation unit for irradiating the sample with an electron beam, while scanning and controlling the beam thereon; a detection unit for detecting secondary electrons generated from the sample as an electric signal; an analog signal processing and amplifying unit to which a detection signal of the detection unit is inputted to be subjected to an analog signal processing and amplified, and then outputted; an AD conversion unit to which the outputted analog signal of the analog signal processing and amplifying unit is inputted to be converted to a digital signal, and then outputted; a processing unit to which the outputted digital signal of the AD conversion unit is inputted to generate data information including an image for use in the measurements or the inspections and also to output the resulting data information; and a band switching unit for switching a frequency band of the analog signal to be passed through the analog signal processing and amplifying unit among a plurality of states in association with a scanning speed of the scanning control and a gain of the detection unit.