PLASMA PROCESSING APPARATUS

摘要

The present invention relates to a plasma processing apparatus. The plasma processing apparatus includes a reaction part which performs a plasma process on an object in a vacuum state, and a jig transfer part which includes a jig having a tray on which the object is placed, a horizontal transfer part which horizontally move the jig to move the tray to the reaction part, and a vertical transfer part which is separated from the horizontal part and vertically moves the jig to vertically move the tray which has been moved to the reaction part.