PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT

摘要

A method for operating a multi-beam particle optical unit comprises the following steps: providing a first setting of an effect of a particle-optical component, wherein a particle-optical imaging is characterized by at least two parameters; determining a matrix A, and determining a matrix S; defining a value of a parameter which characterizes a desired imaging; and providing a second setting of the effect of the component in such a way that the particle-optical imaging is characterized by the parameter having the defined value.