METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATION PIECE, AND PIEZOELECTRIC VIBRATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibration piece capable of reducing cost, and stabilized in frequency.

SOLUTION: The method of manufacturing a piezoelectric vibration piece forming a piezoelectric vibration piece having a target vibration frequency from a piezoelectric wafer comprises: an outline formation step S112 of forming the outline of the piezoelectric vibration piece at a frequency higher than a target vibration frequency; a first metal film formation step S120 of forming a first electrode film on a surface of the piezoelectric vibration piece with the outline formed; a first metal film thickness adjustment step S122 of adjusting the thickness of the first electrode film to be set at a first vibration frequency; and a second metal film formation step S132 of forming a second electrode film on the adjusted first electrode film, and setting the piezoelectric vibration piece at a second vibration frequency.

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