| 摘要 |
PROBLEM TO BE SOLVED: To remove a residue of a resin composition in desmearing treatment, etc., even if the resin component is in uncured or semicured state. SOLUTION: A plasma discharge is generated with a counter electrode 1 and a power source 4, etc., under a pressure condition not to cause the evaporation of the uncured or semicured resin, especially near the atmospheric pressure and the residue of the resin composition of the treating object S is removed by the active species in the discharge. The resin composition residue can be removed even in a state of uncured or semicured resin component. The speed of the removing treatment is remarkably increased by performing the discharge treatment when the resin component is in the uncured or semicured state. COPYRIGHT: (C)2004,JPO |
