Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses

摘要

A multidimensional alignment apparatus is provided for multidimensional aligning of two linear multilayer Laue lenses (MLLs) for two-dimensional hard X-ray focusing. The multidimensional alignment apparatus precisely aligns and ensures stability of two linear MLLs performing hard x-ray focusing. The multidimensional alignment apparatus includes a base, a lower stages group controlling a first upstream MLL, an upper stages group positioned over the lower stages group controlling a second downstream MLL and an upper stage support attached to the base. The lower stages group provides five degrees of freedom precision positioning adjustment for the first upstream MLL. The second downstream MLL is mounted on the upper stages group with three degrees of freedom adjustment capability.