A FLOATER FOR NEUTRON TRANSMUTATION DOPING(NTD) IRRADIATION APPARATUS

摘要

PURPOSE: A floater for NTD(Neutron Transmutation Doping) irradiation device is provided to prevent generation of boiling on a silicon surface by effectively cooling a heat generated in a process for irradiating a silicon single crystal. CONSTITUTION: A floater(200) for NTD irradiation device includes a body(220), a plurality of guide wings(260), and a cover(280). The body has a hollow shape. A top part and a bottom part of the body are closed. A plurality of guide wings are protruded according to an outer circumference of the body. A plurality of guide wings form a partition of a spiral channel(240). The cover surrounds an outer circumference of the guide wing, and is integrally formed with the body. The cover forms an outer wall of the spiral channel.