COLD JOINING DEVICE

摘要

A cold joining device has an angle adjusting mechanism for supporting a first sample base, which holds a first substrate, on a first stage so that the direction of the first sample base can be changed, a first driving device for driving in the first direction the first stage, a second driving device for driving in the second direction a second sample base for holding a second substrate, and a carriage support base for supporting the second sample base in the first direction when the second substrate is pressed against the first substrate. The cold joining device can apply a large load exceeding the load bearing capacity of the second driving device to the first substrate and the second substrate. Also, the cold joining device can change, by using the angle adjusting mechanism, the direction of the first substrate so that the first substrate and the second substrate are in parallel contact with each other, and thus the large load can be uniformly applied to the joined surfaces between the substrates.