| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet sensor which is excellent in a heat resistance and durability, and can consecutively monitor ultraviolet rays in the vicinity of a wavelength of 254 nm without calibrating for adjusting a sensitivity. SOLUTION: On the surface and back of a gallium oxide monocrystal substrate 10, a sensor chip 1 formed with a first electrode 11 and a second electrode 12, respectively, is contained inside a package 2 and is sealed from an external atmosphere. The package 2 includes a window member 21 having a translucence with respect to ultraviolet rays which are a detection target, and leads 31, 32 connected electrically with the first electrode 11 and the second electrode 12 of the sensor chip 1 are pulled out outside of the package 1. COPYRIGHT: (C)2009,JPO&INPIT |
