| 摘要 |
<p>The present invention relates to methods, and related systems and devices, for fabricating selectively patterned piezoelectric substrates suitable for use in a wide variety of systems and devices. A method can include providing a piezoelectric substrate having a protrusion of substrate material, depositing an electrically conductive coating so as to cover a portion of a side of the substrate and protrusion, and removing a portion of the coated protrusion.</p> |
