| 摘要 |
PROBLEM TO BE SOLVED: To provide a material storage container, capable of supplying a processing fluid such as a gasifying material in a vaporized or sublimed state, reducing the capacity of an internal flow passage while securing mounting strength by mounting accumulation valves in an integrated state, and further preventing the processing fluid from being left inside. SOLUTION: In the processing fluid-filled container and the processing fluid-filled container-integrated block valve, an upper surface portion located on the upper surface of a lid, a top plate, a mirror plate or the like of a container body 1 filled with the processing fluid is used as a mount base 2, and a processing fluid supply portion 8 and discharge portion 9 are provided within a thick portion 7 of the mount base 2 so as to communicate with the inside of the container body 1. Accumulation valves 4, 5 that are planar mount valves are directly mounted on a connecting seal surface 11 between the supply portion 8 and the discharge portion 9. COPYRIGHT: (C)2011,JPO&INPIT
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