发明名称 |
Dreidimensionale Mikro-Struktur, Anordnung mit mindestens zwei dreidimensionalen Mikro-Strukturen, Verfahren zum Herstellen der Mikro-Struktur und Verwendung der Mikro-Struktur |
摘要 |
A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed. |
申请公布号 |
DE102009043414(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
DE20091043414 |
申请日期 |
2009.09.29 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
HEDLER, HARRY;ZAPF, JOERG |
分类号 |
B81B1/00;B81C1/00;H01G4/01;H01G9/048 |
主分类号 |
B81B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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