发明名称 |
RECONFIGURABLE MULTI-ZONE GAS DELIVERY HARDWARE FOR SUBSTRATE PROCESSING SHOWERHEADS |
摘要 |
Reconfigurable showerheads used in process chambers for substrate processing are provided herein. In some embodiments, a reconfigurable showerhead may include a body having one or more plenums disposed therein; and one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones. In some embodiments, a substrate processing system may include a process chamber having a reconfigurable showerhead coupled to a gas supply for providing one or more process gases to the process chamber, the reconfigurable showerhead including a body having one or more plenums disposed therein and one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones. |
申请公布号 |
WO2011068730(A2) |
申请公布日期 |
2011.06.09 |
申请号 |
WO2010US57959 |
申请日期 |
2010.11.24 |
申请人 |
APPLIED MATERIALS, INC.;NOORBAKHSH, HAMID;CARDUCCI, JAMES D. |
发明人 |
NOORBAKHSH, HAMID;CARDUCCI, JAMES D. |
分类号 |
H01L21/205;H01L21/3065 |
主分类号 |
H01L21/205 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|