| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film element superior in piezoelectric characteristic and productivity, and a piezoelectric thin film device using the element.SOLUTION: The piezoelectric thin-film element is provided, including on a substrate 1 at least an adhesive layer 2, a lower electrode 3, a piezoelectric thin-film 5 expressed by a general formula (NaKLi)NbO(0≤x≤1, 0≤y≤1, 0≤z≤0.2, x+y+z=1), and an upper electrode laminated thereon, wherein the piezoelectric thin film has a crystal structure of any one of a pseudo-cubic crystal, a tetragonal crystal, or an orthorhombic crystal, and has a crystal structure of coexistence of at least two of the pseudo-cubic crystal, the tetragonal crystal, and the orthorhombic crystal, and the thin film 5 is preferentially oriented in two or less specific axes out of these crystal axes, and an angle formed by at least one of the oriented crystal axes and a normal line of the surface of the substrate 1 is set to be in a range of 0-10°. |
