发明名称 PIEZOELECTRIC VIBRATOR
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator including a structure capable of changing a plurality of characteristics of the piezoelectric vibrator including at least an electromechanical coupling coefficient even when adjusted separately from electrode thickness using a flexural vibration mode.SOLUTION: This piezoelectric vibrator 1 includes a vibration part flexurally vibrating in a normal direction of a principal surface by application of a frequency signal. The vibration part has a structure wherein a plurality of layers including an upper principal surface electrode 2, a piezoelectric substrate 3, a lower principal surface electrode 4 and a dielectric layer 5 are laminated in the principal surface normal direction. The upper principal surface electrode 2 is formed on the upper principal surface of the piezoelectric substrate 3. The lower principal surface electrode 4 is formed on the lower principal surface of the piezoelectric substrate 3. The dielectric layer 5 is laminated on the lower principal surface electrode 4.
申请公布号 JP2011018959(A) 申请公布日期 2011.01.27
申请号 JP20090160493 申请日期 2009.07.07
申请人 MURATA MFG CO LTD 发明人 YONEDA TOSHIMARO
分类号 H03H9/17;G01C19/56;G01P9/04;H01L41/08;H01L41/09;H01L41/18 主分类号 H03H9/17
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