发明名称 METHOD AND APPARATUS FOR MOUNTING ELECTRONIC COMPONENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for mounting an electronic component capable of improving the positional accuracy of a pressurizing mechanism for an electronic component arranged on a substrate. <P>SOLUTION: A semiconductor chip 11 is photographed with an image pickup camera 22f before completely compression-bonding the semiconductor chip 11, and after that, an operation of a second compression-bonding section 22 is executed depending on a result of recognition of the image pickup camera. In this way, a pressurizing operation of the semiconductor chip 11 can be executed for a multipiece substrate 10f after a pressurizing surface P of a second head 22a is parallelly moved to an exact opposite position for the semiconductor chip 11 arranged on the multipiece substrate 10f. Thus, the positional accuracy of the pressurizing surface P can be improved for the semiconductor chip 11. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012114477(A) 申请公布日期 2012.06.14
申请号 JP20120061015 申请日期 2012.03.16
申请人 RENESAS ELECTRONICS CORP 发明人 TAKANO RYUICHI;SUDA TOMIJI
分类号 H01L21/52 主分类号 H01L21/52
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