DEVICE INSPECTION APPARATUS

摘要

PURPOSE: An element inspection device is provided to effectively inspect an LSI(Large Scale Integration) element and to rapidly perform element exchange with an element pressing part. CONSTITUTION: A test part(300) tests an element. An element exchanging part(100) arranges a tray(30) which loads the element begin and after a test. A shuttle part comprises a shuttle plate(210). The shuttle plate is installed which can reciprocate between a peripheral portion of the element exchanging part and a directly overhead portion of the test part. An element pickup part(410) exchanges the element between the element exchanging part and the shuttle part. An element pressing part picks up elements loaded on the shuttle plate or loads the elements on the shuttle plate when the shuttle plated is placed on the upper side of the test part.