发明名称 |
Method and system for characterizing a plasma |
摘要 |
Disclosed are a method and system for measuring the electron energy distribution function (EEDF) in a plasma which has a pronounced drifting Maxwellian component of the EEDF. The method comprises fitting an acquired unfiltered electron current vs. bias voltage curve to a functional form which assumes an EEDF comprising at least one stationary Maxwellian component and at least one drifting Maxwellian component. The method and system allow more accurate characterization of plasmas with electron components with pronounced drift, such as plasmas in microwave surface wave plasma (SWP) sources. |
申请公布号 |
US8660805(B2) |
申请公布日期 |
2014.02.25 |
申请号 |
US201113252988 |
申请日期 |
2011.10.04 |
申请人 |
BRAVENEC RONALD VICTOR;ZHAO JIANPING;TOKYO ELECTRON LIMITED |
发明人 |
BRAVENEC RONALD VICTOR;ZHAO JIANPING |
分类号 |
G01R15/00 |
主分类号 |
G01R15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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