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发明名称
半導体装置の製造方法、接続子、半導体装置及び整列治具
摘要
申请公布号
JP5832885(B2)
申请公布日期
2015.12.16
申请号
JP20110279024
申请日期
2011.12.20
申请人
新電元工業株式会社
发明人
佐々木 敦
分类号
H01L21/60;H01L21/50
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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