Methods for providing run to run process control using a dynamic tuner

摘要

Methods for providing run to run process control using a dynamic tuner are provided. Once such method includes receiving a data point for a process output parameter, determining whether the data point is within a desired range for the process output parameter, setting, when the data point is within the desired range, a dynamic lambda value equal to a preselected base lambda value, setting, when the data point is not within the desired range, the dynamic lambda value equal to a value based on the preselected base lambda value, a degree of difference between the data point and a target for the process output parameter, and a scale factor, calculating an exponentially weighted moving average using the dynamic lambda value, and adjusting the process control parameter in accordance with the exponentially weighted moving average.

主权项

1. A method for providing run to run process control of a process control parameter using a dynamic tuner, the method comprising:
receiving a data point for a process output parameter at a processor; determining, by the processor, whether the data point is within a desired range for the process output parameter; setting, by the processor, when the data point is within the desired range, a dynamic lambda value equal to a preselected base lambda value; setting, by the processor, when the data point is not within the desired range, the dynamic lambda value equal to a value based on the preselected base lambda value, a degree of difference between the data point and a target for the process output parameter, and a scale factor; calculating, by the processor, an exponentially weighted moving average using the dynamic lambda value; adjusting, by the processor, the process control parameter in accordance with the exponentially weighted moving average to produce an adjusted process control parameter; and controlling a manufacturing device using the adjusted process control parameter.