薄型工件载具,申请号TW104213451-传众专利搜索

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法人/股东/高管

发明名称	薄型工件载具
摘要
申请公布号	TWM514102	申请公布日期	2015.12.11
申请号	TW104213451	申请日期	2015.08.20
申请人	凯乐士股份有限公司	发明人	林博文
分类号	H01L21/302;B24B37/04	主分类号	H01L21/302
代理机构		代理人
主权项	一种薄型工件载具，其包含：一抛光盘(10)，系具有一承载面(11)；以及复数个陶瓷加工台(20)，系以间隔方式设置于该抛光盘(10)之该承载面(11)。
地址	桃园市杨梅区高青路22巷20号

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